THE ADVANTAGES OF RPCVD
RPCVD has many potential advantages over current technologies.
The BluGlass' technology uses remote plasma chemical vapour deposition (RPCVD) and has the potential to offer manufacturers significant performance and cost advantages by growing group III nitrides such as gallium nitride and indium gallium nitride at lower temperatures.
• Low temperature
• Increased device performance
• Cost competitive
• More environmentally sustainable and sensitive
• RPCVD can be complementary to current technology as it can be implemented alongside MOCVD infrastructure in order to focus on key low temperature layers for early adoption/market entry