BluGlass (ASX:BLG) has today announced the commissioning of the largest remote plasma chemical vapour deposition (RPCVD) manufacturing platform to date, the BLG-500. The commercial scale RPCVD system has been successfully retrofitted onto a modern generation manufacturing platform, the AIXTRON 2800 G4. This successful commissioning forms a major part of the Company’s commercial scaling activities.
BluGlass has successfully commissioned its commercial scale RPCVD platform - the BLG-500
This largest ever RPCVD platform is a retrofitted AIXTRON AIX-2800 G4
Capable of up to 6 x 6-inch or 42 x 2-inch wafer deposition
Designed to demonstrate the industrial scalability of BluGlass’ unique technology
BluGlass is commercialising a breakthrough semiconductor technology called RPCVD in the global laser diode, LED and microLED industries. BluGlass’ patented hardware and processes offers semiconductor manufacturers unique performance advantages due to RPCVD’s low temperature and hydrogen growth conditions.
This new planetary deposition platform, completed in collaboration with global semiconductor leader, AIXTRON SE, is capable of 6 x 6-inch wafer deposition or 42 x 2-inch wafers; several times the capacity of the previous largest RPCVD system, the BLG-300, capable of 1 x 6 inch or 19 x 2 inch wafer deposition. The new platform, now named the BLG-500, features dual axes of rotation to improve deposition uniformity of the thin film properties across revolving and rotating wafers.
Managing Director, Giles Bourne said “The BLG-500 is the culmination of an enormous two-year design and build project to transform our unique R&D scale technology to one with commercial manufacturing capability. This step is critical to the future success of the company. The 500 is not an incremental next generation of our RPCVD platform, it is instead a radically re-engineered design to deliver ultra-precision uniformity and deposition quality at commercial scale”.
The commissioning of the commercial scale RPCVD system is a significant technology demonstration milestone in the commercialisation of the low-temperature growth platform. The BLG-500’s large scale will significantly increase BluGlass’ foundry customer output capacity at its state-of-the-art Silverwater advanced manufacturing facility. Performance testing and optimisation on the new system continues before the BLG-500 can start to contribute to the product development roadmap for laser diodes and LEDs.
“I’d like to acknowledge the incredible work and dedication of the BluGlass team, specialist consultants and the collaborative support from AIXTRON, all of whom have helped deliver this important milestone” finished Mr. Bourne.
This announcement has been approved for release by the board.